Density-controlled and seedless growth of laterally bridged ZnO nanorod for UV photodetector applications

被引:17
作者
Chuang, Ming-Yueh [1 ,2 ]
Yu, Hsin-Chieh [1 ,2 ]
Su, Yan-Kuin [1 ,2 ,3 ]
Hsiao, Chih-Hung [1 ,2 ]
Kao, Tsung-Hsien [1 ,2 ]
Huang, Chien-Sheng [4 ]
Huang, Yu-Chun [4 ]
Tsai, Jeng-Je [4 ]
Wu, San-Lein [5 ]
机构
[1] Natl Cheng Kung Univ, Inst Microelect, Tainan 701, Taiwan
[2] Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, Tainan 701, Taiwan
[3] Kun Shan Univ, Dept Elect Engn, Tainan 710, Taiwan
[4] Natl Yunlin Univ Sci & Technol, Dept Optoelect Engn, Touliu 64002, Taiwan
[5] Cheng Shiu Univ, Dept Elect Engn, Kaohsiung 833, Taiwan
关键词
Laterally bridged; ZnO nanorod; Hydrothermal growth; UV photodetector; Internal photoconductivity gain; ULTRAVIOLET PHOTOCONDUCTIVE DETECTOR; HYDROTHERMAL SYNTHESIS; THIN-FILMS; DEPOSITION; NANOWIRES; NOISE; PHOTOLUMINESCENCE; WETTABILITY; FABRICATION; MORPHOLOGY;
D O I
10.1016/j.snb.2014.06.004
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
This study develops a density-controlled and seedless growth method for laterally bridged ZnO nanorods from Au electrode for use in metal-semiconductor-metal photodetector fabrication. The effect of pre-annealing process on suppressing vertical ZnO nanorods is systematically investigated by atomic force microscopy and scanning electron microscopy. The pre-annealing process is demonstrated to have direct influence on controlling vertical/lateral ZnO nanorod density and morphology. Interlaced and density-controlled ZnO nanorods with approximate single-crystalline structure can be directly grown from the side wall of pre-annealed Au electrode fingers without seed-layer. Through pre-annealing process, dark-current can be decreased from 4.99 x 10(-4) to 7.28 x 10(-7) A with an applied voltage of 1 V. Highly dense lateral ZnO nanorod-based photodetectors produce remarkable responsivity of 7.01 x 10(3) A/W and UV/visible rejection ratio of 281.21. Moreover, a high internal photoconductive gain (10(4)-10(5)) exists in the fabricated photodetectors. For a given bandwidth of 10 kHz and 1 V applied bias, the noise equivalent power of photodetectors with 0, 10, and 20 min pre-annealing periods are estimated to be 3.58 x 10(-13), 6.78 x 10(-13), and 4.86 x 10(-13) W, and correspond to normalized detectivity of 1.85 x 10(12), 1.17 x 10(12), and 1.99 x 10(12) cm Hz(0.5) W-1, respectively. This result may be attributed to internal photoconductive gain mechanism and high-density bridged ZnO nanorods. Our approach provides a simple and controllable method to fabricate high-performance ultraviolet photodetectors. (C) 2014 Elsevier B.V. All rights reserved.
引用
收藏
页码:810 / 819
页数:10
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