Hydrogen Related Defects in Float Zone Silicon Investigated Using a Shielded Hydrogen Plasma

被引：0

作者：

Bourret-Sicotte, Gabrielle ^{[1
]}

Hamer, Phillip G. ^{[1
]}

Tweddle, David ^{[1
]}

Bonilla, Ruy S. ^{[1
]}

Wilshaw, Peter R. ^{[1
]}

机构：

[1] Univ Oxford, Dept Mat, Parks Rd, Oxford OX1 3PH, England

来源：

2018 IEEE 7TH WORLD CONFERENCE ON PHOTOVOLTAIC ENERGY CONVERSION (WCPEC) (A JOINT CONFERENCE OF 45TH IEEE PVSC, 28TH PVSEC & 34TH EU PVSEC) | 2018年

基金：

英国工程与自然科学研究理事会;

关键词：

hydrogen; bulk defects; n-type float zone; silicon; LIGHT-INDUCED DEGRADATION; CRYSTALLINE SEMICONDUCTORS; N-TYPE; PASSIVATION; DIFFUSION;

D O I：

暂无

中图分类号：

X [环境科学、安全科学];

学科分类号：

08 ; 0830 ;

摘要：

Shielded Hydrogen Passivation (SHP) has been shown to be an effective technique to introduce atomic hydrogen to silicon samples. This allows the study of hydrogen related defects at a range of temperatures without any UV or other process damage. It is found that at 350 degrees C, introduction of atomic hydrogen can cause near surface damage into n-type material that greatly reduces carrier lifetime. In contrast, p-type samples showed no initial degradation, followed by signs of degradation under hot light soaking.

引用

页码：0298 / 0302

页数：5

共 21 条

[1] Corona charge in SiO2: kinetics and surface passivation for high efficiency silicon solar cells
Bonilla, Ruy S.
Jennison, Nicolas
Clayton-Warwick, Deborah
Collett, Katherine A.
Rands, Lucy
Wilshaw, Peter R.
[J]. PROCEEDINGS OF THE 6TH INTERNATIONAL CONFERENCE ON CRYSTALLINE SILICON PHOTOVOLTAICS (SILICONPV 2016), 2016, 92 : 326 - 335
[2] Bourret-Sicotte G., 2017, ENERGY PROCEDIA
[3] Shielded hydrogen passivation - A potential in-line passivation process
Bourret-Sicotte, Gabrielle
Hamer, Phillip
Bonilla, Ruy. S.
Collett, Katherine
Ciesla, Alison
Colwell, Jack
Wilshaw, Peter R.
[J]. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2017, 214 (07):
[4] Bredemeier D., 2017, AIP ADV, V35119
[5] CHAN C, 2017, PHYS STATUS SOLIDI-R, V1, DOI DOI 10.1002/SOLR.201700129
[6] Rapid Stabilization of High-Performance Multicrystalline P-type Silicon PERC Cells
Chan, Catherine E.
Payne, David N. R.
Hallam, Brett J.
Abbott, Malcolm D.
Fung, Tsun H.
Wenham, Alison M.
Tjahjono, Budi S.
Wenham, Stuart R.
[J]. IEEE JOURNAL OF PHOTOVOLTAICS, 2016, 6 (06): : 1473 - 1479
[7] Chen D., 2018, SOL ENERGY MAT SOL C
[8] HYDROGEN-RELATED DEFECTS IN CRYSTALLINE SEMICONDUCTORS - A THEORISTS PERSPECTIVE
ESTREICHER, SK
[J]. MATERIALS SCIENCE & ENGINEERING R-REPORTS, 1995, 14 (7-8) : 319 - 412
[9] Johnson N. M., 1991, MATER SCI FORUM, V38-41, P961
[10] JOHNSON NM, 1987, PHYS REV B, V35, P4166, DOI 10.1103/PhysRevB.35.4166

← 1 2 3 →