Polymer integration of optoelectronic devices in on-board and board-to-board optical communication systems

被引:0
|
作者
Bosman, E. [1 ]
Van Hoe, B. [1 ]
Missinne, J. [1 ]
Van Steenberge, G. [1 ]
机构
[1] IMEC, Ctr Microsyst Technol, Technol Pk 914A, B-9052 Zwijnaarde, Belgium
来源
OPTICAL INTERCONNECTS XIV | 2014年 / 8991卷
关键词
embedding; Moire pattern; optical interconnect; passive alignment; VCSEL;
D O I
10.1117/12.2040479
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
This paper demonstrates a combined packaging and optical coupling scheme for optoelectronic devices in short distance optical communication systems. The proposed scheme allows an ultra short optical path between the optoelectronic component and the optical waveguide entry. This is achieved by embedding the bare die optoelectronics in the substrate of the optical system. The positioning and alignment of the embedded dies is performed with a scalable passive alignment process based on physical alignment studs which are manufactured with standard photolithography combined with the use of Moire interference patterns for precise alignment.
引用
收藏
页数:9
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