Improved surface chemistries, thin film deposition techniques, and stamp designs for nanotransfer printing

被引：100

作者：

Menard, E

Bilhaut, L

Zaumseil, J

Rogers, JA ^{[1
]}

机构：

[1] Univ Illinois, Dept Mat Sci & Engn, Dept Chem, Beckman Inst, Urbana, IL 61801 USA

[2] Univ Illinois, Dept Mat Sci & Engn, Dept Chem, Seitz Mat Res Lab, Urbana, IL 61801 USA

[3] Bell Labs, Lucent Technol, Murray Hill, NJ 07974 USA

来源：

LANGMUIR | 2004年 / 20卷 / 16期

关键词：

D O I：

10.1021/la048827k

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Nanotransfer printing represents an additive approach for patterning thin layers of solid materials with nanometer resolution. The surface chemistries, thin film deposition techniques, and stamp designs are all important for the proper operation of this method. This paper presents some details concerning processing procedures and other considerations needed for patterning two- and three-dimensional nanostructures with low density of defects and minimal distortions.

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收藏

页码：6871 / 6878

页数：8

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