Tuning the dipole at the High-κ/SiO2 interface in advanced metal gate stacks

Combining two different electrical characterisation methods on the same MOS capacitors, we demonstrate that the flat band voltage of High-kappa metal gate stack is determined by a dipole at the High-kappa/SiO2 interface. Meanwhile, roll-off of flat band voltage, occurring for thin SiO2 inter layer, is also associated to a dipole variation at this same interface. We have measured its value and we show that: this dipole is highly influenced by the High-kappa material in contact with the SiO2. Moreover, we also demonstrate its strong dependence on the process conditions. Finally, for a same metal gate and depending on the High-kappa in contact with SiO2, we show that this dipole can induce up to 1.7 eV variation in the gate effective work function. However, controlling the dipole magnitude remains a strong issue especially for the thinnest EOT. (C) 2009 Elsevier B.V. All rights reserved.