Micro-machined WO3-based sensors with improved characteristics

被引：18

作者：

Khatko, V. ^{[1
]}

Vallejos, S. ^{[1
]}

Calderer, J. ^{[2
]}

Gracia, I. ^{[3
]}

Cane, C. ^{[3
]}

Llobet, E. ^{[1
]}

Correig, X. ^{[1
]}

机构：

[1] Univ Rovira & Virgili, Dept Elect Engn, Tarragona 43007, Spain

[2] Univ Politecn Cataluna, Dept Elect Engn, ES-08034 Barcelona, Spain

[3] Univ Autonoma Barcelona, Ctr Nacl Microelect, E-08193 Barcelona, Spain

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2009年 / 140卷 / 02期

关键词：

Micro-machined gas sensor; Air pollutant oxidizing gases; Selectivity; SEMICONDUCTOR GAS SENSORS; SELECTIVITY IMPROVEMENT; SPUTTERED FILMS; THIN-FILMS; METAL; SENSITIVITY; TECHNOLOGY;

D O I：

10.1016/j.snb.2009.05.020

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Characteristics of WO(3)-based micro-machined sensors prepared using modified technologies of sensing layer deposition have been studied. The sensing films were deposited using two sputtering regimes. The first one included three interruptions of the deposition process. The second one comprised a deposition by using a floating regime that included three interruptions as well. in the first two interruptions the sputtering power was 100 W and in the last one the sputtering power was set to 280 W. Additionally to the operations of film deposition, annealing and lift-off processes were optimized. The micro-sensors showed high sensitivity and selectivity to oxidizing gases. The stability of the micro-sensors has been investigated as well. An explanation for the high sensitivity and selectivity of these new micro-sensors is presented in this study. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：356 / 362

页数：7

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