共 31 条
- [31] Room temperature deposition of very thin and flexible crystalline ITO thin film using 3-D facing-magnetron sputtering plasma sourceVACUUM, 2021, 193 (193)Wen, LongSahu, Bibhuti B.Yeom, Geun Y.Han, Jeon G.
Magras - Facility for modelling of plasma facing beryllium sputtering and re-deposition
被引：10
|作者：
Zimin, AM
Elistratov, NG
Kolbasov, BN
Kozlov, OS
Kurochkin, YY
Milyukov, DA
Vasiliev, NN
机构：
[1] NE Bauman Moscow State Tech Univ, Dept E8, Moscow 107005, Russia
[2] Kurchatov Inst, Russell Res Ctr, Moscow 123182, Russia
[3] John Stock Co, Inst Beryllium, Moscow 141070, Russia
来源：
PLASMA DEVICES AND OPERATIONS
|
1999年
/
8卷
/
01期
关键词：
fusion reactor;
plasma-surface interaction;
magnetron;
beryllium sputtering;
erosion products;
D O I：
10.1080/10519999908228143
中图分类号：
TL [原子能技术];
O571 [原子核物理学];
学科分类号：
0827 ;
082701 ;
摘要：
MAGRAS - magnetron facility for simulation of plasma facing beryllium sputtering and re-deposition is described. Optimization of its systems and components along with magnetron discharge phenomenology and its energy characteristics are considered. Studies performed at the facility can be used in designing plasma facing components of International Thermonuclear Experimental Reactor: in particular for their material selection, assessment of the life-time and determination of the near-wall plasma composition.
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页码：15 / 38
页数：24
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