Electron energy distribution function in rare gas micro hollow cathode discharges

被引:0
作者
Petrov, GM [1 ]
Dimova, E
Zhechev, D
机构
[1] USN, Res Lab, Div Plasma Phys, Washington, DC 20375 USA
[2] Bulgarian Acad Sci, Inst Solid State Phys, BU-1784 Sofia, Bulgaria
来源
LIGHT SOURCES 2004 | 2004年 / 182期
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D O I
暂无
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
引用
收藏
页码:233 / 233
页数:1
相关论文
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[1]   Series operation of direct current xenon chloride excimer sources [J].
El-Habachi, A ;
Shi, WH ;
Moselhy, M ;
Stark, RH ;
Schoenbach, KH .
JOURNAL OF APPLIED PHYSICS, 2000, 88 (06) :3220-3224
[2]   Electron energy distribution function and electron characteristics of conventional and micro hollow cathode discharges [J].
Petrov, GM ;
Zhechev, D .
PHYSICS OF PLASMAS, 2002, 9 (05) :1815-1819
[3]   Microhollow cathode discharge excimer lamps [J].
Schoenbach, KH ;
El-Habachi, A ;
Moselhy, MM ;
Shi, WH ;
Stark, RH .
PHYSICS OF PLASMAS, 2000, 7 (05) :2186-2191
[4]   Direct current high-pressure glow discharges [J].
Stark, RH ;
Schoenbach, KH .
JOURNAL OF APPLIED PHYSICS, 1999, 85 (04) :2075-2080