Eliminating anchor loss in optomechanical resonators using elastic wave interference

被引：17

作者：

Zhang, Mian ^{[1
]}

Luiz, Gustavo ^{[2
]}

Shah, Shreyas ^{[1
]}

Wiederhecker, Gustavo ^{[2
]}

Lipson, Michal ^{[1
,3
]}

机构：

[1] Cornell Univ, Sch Elect & Comp Engn, Ithaca, NY 14853 USA

[2] Univ Estadual Campinas, Inst Fis, BR-13083970 Campinas, SP, Brazil

[3] Kavli Inst Cornell Nanoscale Sci, Ithaca, NY 14853 USA

来源：

APPLIED PHYSICS LETTERS | 2014年 / 105卷 / 05期

基金：

巴西圣保罗研究基金会;

关键词：

CIRCULAR PLATE RESONATORS; DISSIPATION; OSCILLATOR; SYSTEMS; FORCE; CHIP;

D O I：

10.1063/1.4892417

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Optomechanical resonators suffer from the dissipation of mechanical energy through the necessary anchors enabling the suspension of the structure. Here, we show that such structural loss in an optomechanical oscillator can be almost completely eliminated through the destructive interference of elastic waves using dual-disk structures. We also present both analytical and numerical models that predict the observed interference of elastic waves. Our experimental data reveal unstressed silicon nitride (Si3N4) devices with mechanical Q-factors up to 10(4) at mechanical frequencies of f = 102 MHz (fQ = 10(12)) at room temperature. (C) 2014 AIP Publishing LLC.

引用

页数：5

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