Room-temperature epitaxial growth of V2O3 films

被引:7
作者
Liu XiangBo [1 ]
Lu HuiBin [1 ]
He Meng [1 ]
Jin KuiJuan [1 ]
Yang GuoZhen [1 ]
机构
[1] Chinese Acad Sci, Beijing Natl Lab Condensed Matter Phys, Inst Phys, Beijing 100190, Peoples R China
来源
SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY | 2014年 / 57卷 / 10期
关键词
room-temperature epitaxy; V2O3; metal-insulator transition; METAL-INSULATOR-TRANSITION; ELECTRONIC-PROPERTIES; VANADIUM-OXIDES; THIN-FILMS; STRAIN; PHASE;
D O I
10.1007/s11433-014-5483-4
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Herein we report the room-temperature epitaxial growth of V2O3 films by laser molecule beam epitaxy. X-ray diffraction profiles show the room-temperature epitaxial V2O3 films orient in the [110] direction on alpha-Al2O3 (0001) substrates. Atomic force microscopy measurements reveal that the ultra-smooth surfaces with root-mean-square surface roughness of 0.11 nm and 0.28 nm for 10-nm-thick and 35-nm-thick V2O3 film, respectively. X-ray photoelectron spectroscopy results indicate the V3+ oxidation state in the films. Typical metal-insulator transition is observed in films at about 135 K. The resistivities at 300 K are approximately 0.8 m Omega cm and 0.5 m Omega cm for 10-nm-thick and 35-nm-thick V2O3 film, respectively.
引用
收藏
页码:1866 / 1869
页数:4
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