High resolution on-chip optical filter array based on double subwavelength grating reflectors

被引：27
|
作者：
Horie, Yu [1 ]
Arbabi, Amir [1 ]
Han, Seunghoon [1 ,2 ]
Faraon, Andrei [1 ]
机构：
[1] CALTECH, Thomas J Watson Lab Appl Phys, Pasadena, CA 91125 USA
[2] Samsung Elect, Samsung Adv Inst Technol, Suwon 443803, Gyeonggi Do, South Korea
来源：
OPTICS EXPRESS | 2015年 / 23卷 / 23期
关键词：
D O I：
10.1364/OE.23.029848
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
An optical filter array consisting of vertical narrow-band Fabry-Perot (FP) resonators formed by two highly reflective high contrast subwavelength grating mirrors is reported. The filters are designed to cover a wide range of operation wavelengths (Delta lambda/lambda = 5%) just by changing the in-plane grating parameters while the device thickness is maintained constant. Operation in the telecom band with transmission efficiencies greater than 40% and quality factors greater than 1,000 are measured experimentally for filters fabricated on the same substrate. (C) 2015 Optical Society of America
引用
收藏
页码：29848 / 29854
页数：7
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