Mechanical and tribological properties of thin remote microwave plasma CVD a-Si:N:C films from a single-source precursor

被引：24
作者：
Bielinski, D
Wrobel, AM
Walkiewicz-Pietrzykowska, A
机构：
[1] Tech Univ Lodz, Inst Polymers, PL-90924 Lodz, Poland
[2] Polish Acad Sci, Ctr Mol & Macromol Studies, PL-90363 Lodz, Poland
来源：
TRIBOLOGY LETTERS | 2002年 / 13卷 / 02期
关键词：
RP-CVD; thin film; silicon carbonitride; hardness; friction; H/E;
D O I：
10.1023/A:1020144313969
中图分类号：
TQ [化学工业];
学科分类号：
0817 ;
摘要：
Silicon carbonitride (a-Si:N:C) films produced by remote plasma chemical vapor deposition (RP-CVD) were investigated. Tetramethyldisilazane as a single-source precursor and (H-2+N-2) upstream gas mixture for plasma generation were used. The influence of the upstream gas composition on the structure, density, mechanical and tribological properties of the films deposited on p-type Si (001) wafers (both heated-T-s=300degreesC and unheated-T-s=30degreesC) are reported. The H-2 RP-CVD process was found to result in the formation of outstanding low friction (muapproximate to0.04) and high hardness (H=27-31 GPa) a-Si:N:C films exhibiting promisingly high H/E values.
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收藏
页码：71 / 76
页数：6
相关论文
共 22 条
[1]  
Anderson D., 1974, ANAL SILICONES
[2]   Silicon nitride film growth by remote plasma CVD using Tris(dimethylamino)silane [J].
Aoki, T ;
Ogishima, T ;
Wróbel, AM ;
Nakanishi, Y ;
Hatanaka, Y .
VACUUM, 1998, 51 (04) :747-750
[3]   Silicon carbonitride: a rival to cubic boron nitride [J].
Badzian, A ;
Badzian, T ;
Drawl, WD ;
Roy, R .
DIAMOND AND RELATED MATERIALS, 1998, 7 (10) :1519-1525
[4]  
Bowden F.P., 1974, FRICTION INTRO TRIBO
[5]   PLASMA-ENHANCED CHEMICAL VAPOR-DEPOSITION OF SILICON-NITRIDE FROM 1,1,3,3,5,5-HEXAMETHYLCYCLOTRISILAZANE AND AMMONIA [J].
BROOKS, TA ;
HESS, DW .
THIN SOLID FILMS, 1987, 153 :521-529
[6]  
Fracassi F., 1996, Plasmas and Polymers, V1, P3, DOI 10.1007/BF02532811
[7]   On the significance of the H/E ratio in wear control:: a nanocomposite coating approach to optimised tribological behaviour [J].
Leyland, A ;
Matthews, A .
WEAR, 2000, 246 (1-2) :1-11
[8]   AN IMPROVED TECHNIQUE FOR DETERMINING HARDNESS AND ELASTIC-MODULUS USING LOAD AND DISPLACEMENT SENSING INDENTATION EXPERIMENTS [J].
OLIVER, WC ;
PHARR, GM .
JOURNAL OF MATERIALS RESEARCH, 1992, 7 (06) :1564-1583
[9]  
PLANO L, 1993, DIAMOND FILMS COATIN, P376
[10]   A COVALENT MICRO NANOCOMPOSITE RESISTANT TO HIGH-TEMPERATURE OXIDATION [J].
RIEDEL, R ;
KLEEBE, HJ ;
SCHONFELDER, H ;
ALDINGER, F .
NATURE, 1995, 374 (6522) :526-528
123