1T phase as an efficient hole injection layer to TMDs transistors: a universal approach to achieve p-type contacts

被引:41
作者
Hu, Xiaohui [1 ,2 ]
Wang, Yifeng [1 ,2 ]
Shen, Xiaodong [1 ,2 ]
Krasheninnikov, Arkady V. [3 ,4 ]
Sun, Litao [5 ]
Chen, Zhongfang [6 ]
机构
[1] Nanjing Tech Univ, Coll Mat Sci & Engn, Nanjing 210009, Jiangsu, Peoples R China
[2] Nanjing Tech Univ, Jiangsu Collaborat Innovat Ctr Adv Inorgan Funct, Nanjing 210009, Jiangsu, Peoples R China
[3] Helmholtz Zentrum Dresden Rossendorf, Inst Ion Beam Phys & Mat Res, D-01314 Dresden, Germany
[4] Aalto Univ, Sch Sci, Dept Appl Phys, POB 11100, Aalto 00076, Finland
[5] Southeast Univ, Collaborat Innovat Ctr Micro Nano Fabricat Device, SEU FEI Nano Pico Ctr, Key Lab MEMS,Minist Educ, Nanjing 210096, Jiangsu, Peoples R China
[6] Univ Puerto Rico, Dept Chem, Rio Piedras Campus, San Juan, PR 00931 USA
基金
中国国家自然科学基金; 芬兰科学院;
关键词
transition metal dichalcogenides; 2D materials; density functional theory calculations; p-type contacts; TRANSITION-METAL DICHALCOGENIDES; TOTAL-ENERGY CALCULATIONS; MOLYBDENUM-DISULFIDE; GRAPHENE OXIDE; BILAYER MOS2; MONOLAYER; HETEROSTRUCTURES; ELECTRONICS; CHEMISTRY; MECHANISM;
D O I
10.1088/2053-1583/aac859
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Recently, the fabricated MoS2 field effect transistors (FETs) with 1T-MoS2 electrodes exhibit excellent performance with rather low contact resistance, as compared with those with metals deposited directly on 2H-MoS2 (Kappera et al 2014 Nat. Mater. 13 1128), but the reason for that remains elusive. By means of density functional theory calculations, we investigated the carrier injection at the 1T/2H MoS2 interface and found that although the Schottky barrier height (SBH) values of 1T/2H MoS2 interfaces can be tuned by controlling the stacking patterns, the p-type SBH values of 1T/2H MoS2 interfaces with different stackings are lower than their corresponding n-type SBH values, which demonstrated that the metallic 1T phase can be used as an efficient hole injection layer for 2H-MoS2. In addition, as compared to the n-type Au/MoS2 and Pd/MoS2 contacts, the p-type SBH values of 1T/2H MoS2 interfaces are much lower, which stem from the efficient hole injection between 1T-MoS2 and 2H-MoS2. This can explain the low contact resistance in the MoS2 FETs with 1T-MoS2 electrodes. Notably, the SBH values can be effectively modulated by an external electric field, and a significantly low p-type SBH value can be achieved under an appropriate electric field. We also demonstrated that this approach is also valid for WS2, WSe2 and MoSe2 systems, which indicates that the method can most likely be extended to other TMDs, and thus may open new promising avenues of contact engineering in these materials.
引用
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页数:10
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