Investigation of Thermal Bonding on PMMA Capillary Electrophoresis Chip

被引:4
作者
Zhang, Haifeng [1 ]
Liu, Xiaowei [1 ,2 ]
Peng, Zhicheng [1 ]
Wang, Wei [1 ]
Chen, Yufeng [3 ]
机构
[1] Harbin Inst Technol, MEMS Ctr, Harbin 150006, Peoples R China
[2] Minist Educ, Key Lab Micro Syst & Micro Struct Mfg, Beijing, Peoples R China
[3] No 1 Flight Coll Air Force, Harbin, Peoples R China
来源
MICRO AND NANO TECHNOLOGY: 1ST INTERNATIONAL CONFERENCE OF CHINESE SOCIETY OF MICRO/NANO TECHNOLOGY(CSMNT) | 2009年 / 60-61卷
关键词
PMMA; Capillary Electrophoresis; Thermal bonding; Factor; Deformation; MICROFLUIDIC CHIPS;
D O I
10.4028/www.scientific.net/AMR.60-61.288
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In this paper, using the powder hot embossing machine, the effects of the bonding temperature, pressure and time on the deformation of microchannel dimensions is studied systematically. The bonding temperature is mainly influence factor on the deformation of microchannel determined by the method of orthogonal experiment. Some mathematical models are described to optimize the thermal bonding process parameters. According theory and experimental curve, the optimal experimental model (83 degrees C, 0.4Mpa and 7 min) is suggested. Under the process parameters the deformation of crossing section dimension before and after thermal bonding is 37.8%. The channel is successfully scaled underneath with a thin foil 30 mu m thickness PMMA for contactless conductivity detection. The entire fabrication methodology may also be useful for preparation of other polymer microfluiclic systems. Finally, the performance of the PMMA chip is demonstrated to separate continuously K+ ions using the contactless conductivity detection.
引用
收藏
页码:288 / +
页数:2
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