Influence of the experimental parameters on silicon nanoparticles produced by laser ablation

Influence of the laser wavelength, fluence, gas and gas pressure on silicon nanoparticles produced by laser ablation is reported. Nanoparticles ranging from 2 nm to 13 nm were generated by ablation of silicon target into He or Ar, (250-550 mbar) with a Nd:YAG laser, (335 and 532 nm, 5 ns), at a fluence of 4-8 J/cm(2). The shape, structure, and size distribution were determined by transmission electron microscopy. 90% of nanoparticles were in the range 2-10 nm, regardless pressure, wavelength or fluence. The wavelength 355 nm and higher fluence, 8 J/cm(2), are more suitable for smaller nanoparticle synthesis (2-5 nm). The optimal conditions for an efficient synthesis of minimum sized silicon nanoparticles were 355 nm / 8 J/cm(2) / 550 mbar / He.