A CMOS image sensor with dual pixel reset voltage for high accuracy ultraviolet light absorption spectral imaging

被引：10

作者：

Aoyagi, Yusuke ^{[1
]}

Fujihara, Yasuyuki ^{[1
]}

Murata, Maasa ^{[1
]}

Shike, Hiroya ^{[1
]}

Kuroda, Rihito ^{[1
]}

Sugawa, Shigetoshi ^{[1
]}

机构：

[1] Tohoku Univ, Grad Sch Engn, Sendai, Miyagi 9808579, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2019年 / 58卷 / SB期

关键词：

OZONE; SYSTEMS;

D O I：

10.7567/1347-4065/aaffc1

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

In this paper, we report a CMOS image sensor (CIS) with dual pixel reset voltage and high sensitivity to ultraviolet (UV) light for high SNR UV light absorption spectral imaging. The dual pixel reset voltage was introduced in order to improve the accuracy of absorption imaging by suppressing the fixed pattern noise due to the threshold voltage (Vth) variation. The developed CIS exhibited 71 dB SNR, 15 Me- full well capacity and high quantum efficiency to UV light. As an application of the developed CIS, the diffusion of sub-ppm concentration ozonated water into ultrapure water (UPW) was successfully visualized under the 254 nm light waveband. (C) 2019 The Japan Society of Applied Physics

引用

页数：6

共 34 条

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