Evaluation of the error in 3D deformation measurement from the combination of in plane and out-of-plane ESPI interferometers

被引：0

作者：

Martinez, Amalia ^{[1
]}

Rayas, Juan Antonio ^{[1
]}

机构：

[1] Ctr Invest Opt AC, Apartado Postal 1-948, Leon 37000, Gto, Mexico

来源：

SPECKLE06: SPECKLES, FROM GRAINS TO FLOWERS | 2006年 / 6341卷

关键词：

optical metrology; 3-D deformation in-plane and out-of-plane; ESPI; sensitivity matrix;

D O I：

10.1117/12.695498

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We report on the errors obtained by comparing the in- and out-of-plane displacements calculated from the sensitivity matrix with all its components and when it is considered only the component of the largest contributing of each one of the three interferometers. Divergent illumination is considered in the sensitivity vectors evaluation to measure displacement vector components. This analysis is made for a flat elastic target by using of Electronic Speckle Pattern Interferometry (ESPI).

引用

页数：6