Dose-rate dependence of radiation induced interface trap density in silicon bipolar transistors

被引:14
作者
Hjalmarson, H. P.
Pease, R. L.
Hembree, C. E.
Van Ginhoven, R. M.
Schultz, P. A.
机构
[1] Sandia Natl Labs, Albuquerque, NM 87185 USA
[2] RLP Res, Los Lunas, NM 87031 USA
关键词
silicon dioxide; ionizing radiation; hydrogen; interface traps; fixed charge; ELDRS;
D O I
10.1016/j.nimb.2006.04.122
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
The key effects of ionizing radiation on silicon dioxide are described and computed. Inclusion of bimolecular electron-hole recombination is shown to produce a saturation of fixed charge at high total dose and to a reduction in interface trap density at high dose-rates. These results can explain the enhanced low dose rate sensitivity (ELDRS) phenomenon. These results also predict a new dose-rate dependence at very high dose rates. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:269 / 273
页数:5
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