CO2 Gas Sensors Based on Carbon Nanotube Thin Films Using a Simple Transfer Method on Flexible Substrate

被引:43
作者
Lin, Zheng-Dong [1 ,2 ]
Young, Sheng-Joue [3 ]
Chang, Shoou-Jinn [1 ,2 ]
机构
[1] Natl Cheng Kung Univ, Ctr Micro Nano Sci & Technol, Tainan 701, Taiwan
[2] Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, Dept Elect Engn, Inst Microelect, Tainan 701, Taiwan
[3] Natl Formosa Univ, Dept Elect Engn, Yunlin 632, Taiwan
关键词
Carbon nanotube; gas sensor; flexible; ADSORPTION; NANOWIRES; GROWTH; AU;
D O I
10.1109/JSEN.2015.2472968
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper presents a flexible carbon nanotube (CNT)-based gas sensor on a low-cost polyimide substrate that responds immediately to CO2 at room temperature. Highly uniform CNT thin films, prepared by a reliable and reproducible transfer process, are used as resistive networks in gas detection. The flexible gas sensor exhibited a high sensitivity of 2.23% at room temperature when the concentration of ambient CO2 gas was 800 ppm. Both the speed and the stability of response of the fabricated sensor were favorable.
引用
收藏
页码:7017 / 7020
页数:4
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