InP-Based Membrane Couplers for Optical Interconnects on Si

被引：5

作者：

Binetti, Pietro R. A. ^{[1
]}

Orobtchouk, Regis ^{[2
]}

Leijtens, Xaveer J. M. ^{[1
]}

Han, Bing ^{[1
,2
]}

de Vries, T.

Oei, Yoki-Siang ^{[1
]}

Di Cioccio, Lea ^{[3
]}

Fedeli, Jean-Marc ^{[3
]}

Lagahe, Chrystelle ^{[4
]}

van Veldhoven, P. J. ^{[1
]}

Noetzel, Richard ^{[1
]}

Smit, Meint K. ^{[1
]}

机构：

[1] Tech Univ Eindhoven, COBRA Res Inst, NL-5600 MB Eindhoven, Netherlands

[2] Univ Lyon, Inst Nanotechnol Lyon, CNRS, UMR5270, F-69621 Lyon, France

[3] CEA LETI, F-38054 Grenoble, France

[4] TRACIT Technol, F-38054 Grenoble, France

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2009年 / 21卷 / 05期

关键词：

Bonding; flip-chip devices; optical interconnections;

D O I：

10.1109/LPT.2008.2011649

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present the design, fabrication, and characterization of a membrane coupler processed on an indium phosphide membrane layer on a silicon-on-insulator wafer, that is used for applications in optical interconnects on silicon. Measured coupler efficiency is 50%. The photonic device fabrication is compatible with wafer scale processing steps, guaranteeing compatibility towards future generation electronic integrated circuit processing.

引用

页码：337 / 339

页数：3

共 6 条

[1]

CIOCCIO LD, 2006, 210 M EL SOC CANC ME, P602

[2]

HAN B, 2007, P 13 EUR C INT OPT E

[3] Extremely low-power logic [J].

Piguet, C ;

Gautier, J ;

Heer, C ;

O'Connor, I ;

Schlichtmann, U .

DESIGN, AUTOMATION AND TEST IN EUROPE CONFERENCE AND EXHIBITION, VOLS 1 AND 2, PROCEEDINGS, 2004, :656-661

[4] Electrically pumped InP-based microdisk lasers integrated with a nanophotonic silicon-on-insulator waveguide circuit [J].

Van Campenhout, J. ;

Rojo-Romeo, P. ;

Regreny, P. ;

Seassal, C. ;

Van Thourhout, D. ;

Verstuyft, S. ;

Di Cioccio, L. ;

Fedeli, J.-M. ;

Lagahe, C. ;

Baets, R. .

OPTICS EXPRESS, 2007, 15 (11) :6744-6749

[5]

VANTHOURHOUT D, 2005, P LEOS ANN M 2005 SY

[6]

VANTHOURHOUT D, 2007, P 33 EUR C OPT COMM

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