ScAlN MEMS Cantilevers for Vibrational Energy Harvesting Purposes

被引：46

作者：

Mayrhofer, P. M. ^{[1
]}

Rehlendt, C. ^{[1
]}

Fischeneder, M. ^{[1
]}

Kucera, M. ^{[1
,2
]}

Wistrela, E. ^{[1
]}

Bittner, A. ^{[1
]}

Schmid, U. ^{[1
]}

机构：

[1] TU WIEN, Inst Sensor & Actuator Syst, A-1040 Vienna, Austria

[2] Fest AG, A-1100 Vienna, Austria

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2017年 / 26卷 / 01期

基金：

奥地利科学基金会;

关键词：

Piezoelectric; energy harvesting; thin film; cantilever; modeling; ALN THIN-FILMS; PIEZOELECTRIC PROPERTIES; ETCHING BEHAVIOR; GENERATOR; STRESS;

D O I：

10.1109/JMEMS.2016.2614660

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Piezoelectric energy harvesting offers the possibility to make use of ambient vibrations most beneficially to feed low power sensor nodes. This paper demonstrates the fabrication and characterization of piezoelectric cantilevers with AlN and ScxAl1-xN (x = 27%) thin films for the evaluations of their energy harvesting performance. The characterization mainly focuses on the measurement of the output power at variable load resistance to achieve maximum power output. Superior properties of ScAlN thin films for energy harvesting compared with AIN films are confirmed. Furthermore, an analytical model is employed to extract material parameters for ScAlN. High piezoelectric coefficients e31 = 1.6 C/m(2) and d(31) = 6.9 pm/V are determined for ScAlN. Finally, a proof mass is attached to further increase the output power at optimized load resistance.

引用

页码：102 / 112

页数：11

共 54 条

[1] Etching behaviour of sputter-deposited aluminium nitride thin films in H3PO4 and KOH solutions [J].

Ababneh, A. ;

Kreher, H. ;

Schmid, U. .

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2008, 14 (4-5) :567-573

[2] The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thin films [J].

Ababneh, A. ;

Schmid, U. ;

Hernando, J. ;

Sanchez-Rojas, J. L. ;

Seidel, H. .

MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS, 2010, 172 (03) :253-258

[3] Influence of scandium concentration on power generation figure of merit of scandium aluminum nitride thin films [J].

Akiyama, Morito ;

Umeda, Keiichi ;

Honda, Atsushi ;

Nagase, Toshimi .

APPLIED PHYSICS LETTERS, 2013, 102 (02)

[4] Experimental and theoretical studies on MEMS piezoelectric vibrational energy harvesters with mass loading [J].

Andosca, Robert ;

McDonald, T. Gus ;

Genova, Vincent ;

Rosenberg, Steven ;

Keating, Joseph ;

Benedixen, Cole ;

Wu, Junru .

SENSORS AND ACTUATORS A-PHYSICAL, 2012, 178 :76-87

[5]

[Anonymous], 2012, P 2012 IEEE INT ULTR

[6] A review of power harvesting using piezoelectric materials (2003-2006) [J].

Anton, Steven R. ;

Sodano, Henry A. .

SMART MATERIALS AND STRUCTURES, 2007, 16 (03) :R1-R21

[7] Energy harvesting vibration sources for microsystems applications [J].

Beeby, S. P. ;

Tudor, M. J. ;

White, N. M. .

MEASUREMENT SCIENCE AND TECHNOLOGY, 2006, 17 (12) :R175-R195

[8] Piezoelectric coefficients and spontaneous polarization of ScAlN [J].

Caro, Miguel A. ;

Zhang, Siyuan ;

Riekkinen, Tommi ;

Ylilammi, Markku ;

Moram, Michelle A. ;

Lopez-Acevedo, Olga ;

Molarius, Jyrki ;

Laurila, Tomi .

JOURNAL OF PHYSICS-CONDENSED MATTER, 2015, 27 (24)

[9] Analytical modeling of piezoelectric vibration-induced micro power generator [J].

Chen, Shih-Nung ;

Wang, Gou-Jen ;

Chien, Ming-Chun .

MECHATRONICS, 2006, 16 (07) :379-387

[10] Powering MEMS portable devices - a review of non-regenerative and regenerative power supply systems with special emphasis on piezoelectric energy harvesting systems [J].

Cook-Chennault, K. A. ;

Thambi, N. ;

Sastry, A. M. .

SMART MATERIALS AND STRUCTURES, 2008, 17 (04)

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