Direct Fabrication of Micro/Nano-Patterned Surfaces by Vertical-Directional Photofluidization of Azobenzene Materials

被引:57
作者
Choi, Jaeho [1 ]
Cho, Wonhee [1 ]
Jung, Yeon Sik [2 ]
Kang, Hong Suk [4 ]
Kim, Hee-Tak [1 ,3 ]
机构
[1] Korea Adv Inst Sci & Technol, Dept Chem & Biomol Engn, Taejon 305701, South Korea
[2] Korea Adv Inst Sci & Technol, Dept Mat Sci & Engn, Taejon 305701, South Korea
[3] Korea Adv Inst Sci & Technol, KAIST Inst NanoCentury, Taejon 305701, South Korea
[4] Univ Penn, Dept Mat Sci & Engn, 3231 Walnut St, Philadelphia, PA 19104 USA
关键词
micro/nano patterning; azobenzene materials; athermal photofluidization; imprint lithography; multiscale structures; CAPILLARY-FORCE LITHOGRAPHY; AZO-POLYMER-FILMS; RELIEF GRATINGS; NANOIMPRINT LITHOGRAPHY; SOFT LITHOGRAPHY; ARRAYS; ARCHITECTURES; NANOPATTERNS; ILLUMINATION; TRANSPORT;
D O I
10.1021/acsnano.6b05934
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Anisotropic movement of azobenzene materials (i.e., azobenzene molecules incorporated in polymer, glass, or supramolecules) has provided significant opportunities for the fabrication of micro/nanoarchitectures. The examples include circular holes, line gaps, ellipsoidal holes, and nanofunnels. However, all of the previous studies have only focused on the lateral directional movement for the structural shaping of azobenzene materials. Herein, we propose structural shaping based on a vertical directional movement of azobenzene materials. To do this, light with oblique incidence, containing normal direction light polarization, was illuminated onto azobenzene materials film contact with patterned elastomeric molds (i.e., PDMS) so that the resulting vertical directional movement of azobenzene materials fills in the cavities of the molds and results in pattern formation. As a result, a range of patterns with sizes of features from micro- to sub-100 nm scale was successfully fabricated in a large area (few cm(2)), and the structural height was deterministically controlled by simply adjusting irradiation time. In addition to the notable capability of fabricating the single-scale structures, the technique provides a facile way to fabricate complex hierarchical multiscale structures, ensuring its versatility and wide applicability to various applications. As a selected exemplary application of the multiscale structures, a superhydrophobic surface has been successfully demonstrated.
引用
收藏
页码:1320 / 1327
页数:8
相关论文
共 61 条
[1]   Redox-Active, Organometallic Surface-Relief Gratings from Azobenzene-Containing Polyferrocenylsilane Block Copolymers [J].
Ahmed, Rumman ;
Priimagi, Arri ;
Faul, Charl F. J. ;
Manners, Ian .
ADVANCED MATERIALS, 2012, 24 (07) :926-+
[2]   Light-induced spiral mass transport in azo-polymer films under vortex-beam illumination [J].
Ambrosio, Antonio ;
Marrucci, Lorenzo ;
Borbone, Fabio ;
Roviello, Antonio ;
Maddalena, Pasqualino .
NATURE COMMUNICATIONS, 2012, 3
[3]   From micro to nano contacts in biological attachment devices [J].
Arzt, E ;
Gorb, S ;
Spolenak, R .
PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, 2003, 100 (19) :10603-10606
[4]   25th Anniversary Article: Scalable Multiscale Patterned Structures Inspired by Nature: the Role of Hierarchy [J].
Bae, Won-Gyu ;
Kim, Hong Nam ;
Kim, Doogon ;
Park, Suk-Hee ;
Jeong, Hoon Eui ;
Suh, Kahp-Yang .
ADVANCED MATERIALS, 2014, 26 (05) :675-699
[5]   Multiplex lithography for multilevel multiscale architectures and its application to polymer electrolyte membrane fuel cell [J].
Cho, Hyesung ;
Kim, Sang Moon ;
Kang, Yun Sik ;
Kim, Junsoo ;
Jang, Segeun ;
Kim, Minhyoung ;
Park, Hyunchul ;
Bang, Jung Won ;
Seo, Soonmin ;
Suh, Kahp-Yang ;
Sung, Yung-Eun ;
Choi, Mansoo .
NATURE COMMUNICATIONS, 2015, 6
[6]   Microfluidic platforms with monolithically integrated hierarchical apertures for the facile and rapid formation of cargo-carrying vesicles [J].
Cho, Hyesung ;
Kim, Junsoo ;
Suga, Keishi ;
Ishigami, Takaaki ;
Park, Hyunchul ;
Bang, Jung Won ;
Seo, Soonmin ;
Choi, Mansoo ;
Chang, Pahn-Shick ;
Umakoshi, Hiroshi ;
Jung, Sup ;
Suh, Kahp-Yang .
LAB ON A CHIP, 2015, 15 (02) :373-377
[7]   Replication of flexible polymer membranes with geometry-controllable nano-apertures via a hierarchical mould-based dewetting [J].
Cho, Hyesung ;
Kim, Junsoo ;
Park, Hyunchul ;
Bang, Jung Won ;
Hyun, Moon Seop ;
Bae, Yongjun ;
Ha, Laura ;
Kim, Do Yoon ;
Kang, Seong Min ;
Park, Tae Jung ;
Seo, Soonmin ;
Choi, Mansoo ;
Suh, Kahp-Yang .
NATURE COMMUNICATIONS, 2014, 5
[8]   Spatially Selective Nucleation and Growth of Water Droplets on Hierarchically Patterned Polymer Surfaces [J].
Cho, Younghyun ;
Shim, Tae Soup ;
Yang, Shu .
ADVANCED MATERIALS, 2016, 28 (07) :1433-1439
[9]   IMPRINT OF SUB-25 NM VIAS AND TRENCHES IN POLYMERS [J].
CHOU, SY ;
KRAUSS, PR ;
RENSTROM, PJ .
APPLIED PHYSICS LETTERS, 1995, 67 (21) :3114-3116
[10]   Fabrication approaches for generating complex micro- and nanopatterns on polymeric surfaces [J].
del Campo, Aranzazu ;
Arzt, Eduard .
CHEMICAL REVIEWS, 2008, 108 (03) :911-945