Investigation on cavitation erosion of diamond-like carbon films with heterogeneous multilayer structure

被引：7
作者：
Cheng, Feng [1 ,2 ]
Wu, Fujia [3 ]
Liu, Linlin [4 ]
Yang, Shifei [5 ]
Ji, Weixi [1 ,2 ]
机构：
[1] Jiangnan Univ, Jiangsu Key Lab Adv Food Mfg Equipment & Technol, Wuxi 214122, Jiangsu, Peoples R China
[2] Jiangnan Univ, Sch Mech Engn, Wuxi 214122, Jiangsu, Peoples R China
[3] Xian Technol Univ, Sch Mechatron Engn, Xian 710021, Shaanxi, Peoples R China
[4] Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201800, Peoples R China
[5] Nanjing Kaiaosi Data Technol Co Ltd, Nanjing 210012, Peoples R China
来源：
SURFACE & COATINGS TECHNOLOGY | 2021年 / 405卷
基金：
中国博士后科学基金;
关键词：
Multilayer DLC films; Cavitation erosion; Uplift; Flexural crack; Fatigue; DLC-COATINGS; MECHANICAL-PROPERTIES; ADHESION STRENGTH; RESISTANCE; SUBSTRATE; STEEL; TI; MICROSTRUCTURE; EVOLUTION; BEHAVIOR;
D O I：
10.1016/j.surfcoat.2020.126682
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Cavitation tests of three heterogeneous multilayer diamond-like carbon (DLC) films (Ti/DLC, TiCx/DLC and Ti-TiCx/DLC) were performed using a vibratory test rig to evaluate their cavitation erosion resistance. Results indicated that the cavitation erosion of multilayer DLC films resulted from flexural cracks in the bending regions, then fatigue failures were developed along the uplifted regions of the films. Comparing to TiCx/DLC film and Ti-TiCx/DLC film, Ti/DLC film had the lowest average erosion area. It was concluded that multilayer structure with titanium as adhesion layer improved the adhesion strength and reduced the plastic deformations of the DLC films in the incubation phase; these Ti layers also decreased the residual stress of the DLC films and reduced the cracks within the films in the attenuation phase; lower I-D/I-G ratio could improve the fatigue resistance of the multilayer films in the steady phase.
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页数：13
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