Well-aligned and suspended single-walled carbon nanotube film: Directed self-assembly, patterning, and characterization

被引：33

作者：

Lu, Miao ^{[1
]}

Jang, Min-Woo ^{[2
]}

Haugstad, Greg ^{[3
]}

Campbell, Stephen A. ^{[2
]}

Cui, Tianhong ^{[1
]}

机构：

[1] Univ Minnesota, Dept Mech Engn, Minneapolis, MN 55455 USA

[2] Univ Minnesota, Dept Elect & Comp Engn, Minneapolis, MN 55455 USA

[3] Univ Minnesota, Characterizat Facil, Minneapolis, MN 55455 USA

来源：

APPLIED PHYSICS LETTERS | 2009年 / 94卷 / 26期

关键词：

carbon nanotubes; electrical resistivity; electrophoresis; ion beam effects; nanolithography; nanopatterning; self-assembly; sputter etching; thin films; Young's modulus; DIELECTROPHORESIS; TRANSISTORS; ROPES;

D O I：

10.1063/1.3151850

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Self-assembly process, patterning, and characterization of well-aligned single-walled carbon nanotube (SWNT) films are presented in this letter. The dc current in an ac dielectrophoresis of an SWNT solution was measured and used to control the self-assembly process to get an oriented, compact SWNT film 15-20 nm thick. The film was further patterned to form submicron beams by focused ion beams, or lithography and oxygen plasma etching. The Young's modulus of the film ranged from 350 to 830 GPa. The electrical resistivity was about 8.7x10(-3) cm. The temperature coefficient of resistance was -1.2%/K.

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