Confocal pore size measurement based on super-resolution image restoration

被引：3
作者：
Liu, Dali [1 ]
Wang, Yun [1 ]
Qiu, Lirong [1 ]
Mao, Xinyue [1 ]
Zhao, Weiqian [1 ]
机构：
[1] Beijing Inst Technol, Sch Optoelect, Beijing Key Lab Precis Optoelect Measurement Inst, Beijing 100081, Peoples R China
来源：
APPLIED OPTICS | 2014年 / 53卷 / 25期
基金：
美国国家科学基金会; 国家高技术研究发展计划(863计划);
关键词：
MEMBRANE; MICROSCOPY; FILTRATION; WATER;
D O I：
10.1364/AO.53.005694
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A confocal pore size measurement based on super-resolution image restoration is proposed to obtain a fast and accurate measurement for submicrometer pore size of nuclear track-etched membranes (NTEMs). This method facilitates the online inspection of the pore size evolution during etching. Combining confocal microscopy with super-resolution image restoration significantly improves the lateral resolution of the NTEM image, yields a reasonable circle edge-setting criterion of 0.2408, and achieves precise pore edge detection. Theoretical analysis shows that the minimum measuring diameter can reach 0.19 mu m, and the root mean square of the residuals is only 1.4 nm. Edge response simulation and experiment reveal that the edge response of the proposed method is better than 80 nm. The NTEM pore size measurement results obtained by the proposed method agree well with that obtained by scanning electron microscopy. (C) 2014 Optical Society of America
引用
收藏
页码：5694 / 5700
页数：7
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