Derivative method for dual-wavelength three-frame phase-shifting interferometry

被引:7
作者
Xu, Yuanyuan [1 ,2 ]
Liang, Yu [2 ]
Zou, Yang [3 ]
Shen, Qibao [2 ]
Xue, Shuangshuang [2 ]
Wang, Yawei [2 ]
Zhu, Shining [1 ]
机构
[1] Nanjing Univ, Sch Phys, Nanjing 210093, Peoples R China
[2] Jiangsu Univ, Fac Sci, Zhenjiang 212013, Jiangsu, Peoples R China
[3] Jiangsu Univ, Jingjiang Coll, Zhenjiang 212013, Jiangsu, Peoples R China
来源
OPTIK | 2021年 / 226卷
基金
中国国家自然科学基金;
关键词
Dual-wavelength; Three frame phase-shifting interferometry; Derivative; Phase measurement; DIGITAL HOLOGRAPHY; SINGLE-SHOT; REFRACTIVE-INDEX; MICROSCOPY; RETRIEVAL;
D O I
10.1016/j.ijleo.2020.165953
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Dual-wavelength interferometry is an important technique, which is widely used in optical measurement and microscopy imaging. In this study, a phase extraction method using derivative algorithm for simultaneous dual-wavelength three-frame phase-shifting interferometry is proposed. Only by calculating the difference between the first and other interferograms as well as its first-order and second-order derivatives, one can separate the information of single-wavelength and obtain continuous phase of the synthetic wavelength. The phase shift can be any value between (0, 2 pi). Simulation and experimental results demonstrate that this method can be used to dual-wavelength on-axis and off-axis interferometric imaging systems with high accuracy. Since only three phase-shifted interferograms are required and only partial derivative algorithm is used, the imaging speed is faster.
引用
收藏
页数:8
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