High-Resolution Multislice X-Ray Ptychography of Extended Thick Objects

被引：91

作者：

Suzuki, Akihiro ^{[1
]}

Furutaku, Shin ^{[1
]}

Shimomura, Kei ^{[1
]}

Yamauchi, Kazuto ^{[1
]}

Kohmura, Yoshiki ^{[2
]}

Ishikawa, Tetsuya ^{[2
]}

Takahashi, Yukio ^{[1
]}

机构：

[1] Osaka Univ, Grad Sch Engn, Suita, Osaka 5650871, Japan

[2] RIKEN SPring 8 Ctr, Sayo, Hyogo 6795148, Japan

来源：

PHYSICAL REVIEW LETTERS | 2014年 / 112卷 / 05期

关键词：

DIFFRACTION; MICROSCOPY; BEAM;

D O I：

10.1103/PhysRevLett.112.053903

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

We report the first demonstration of hard x-ray ptychography using a multislice approach, which can solve the problem of the limited spatial resolution under the projection approximation. We measured ptychographic diffraction patterns of a two-layered object with a 105 mu m gap using 7 keV focused coherent x rays. We successfully reconstructed the phase map of each layer at similar to 50 nm resolution using a multislice approach, while the resolution was worse than similar to 192 nm under the projection approximation. The present method has the potential to enable the three-dimensional high-resolution observation of extended thick specimens in materials science and biology.

引用

页数：5

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