Role of oxygen defects in inducing the blue photoluminescence of zinc oxide films deposited by magnetron sputtering

被引：8

作者：

Chen, Kun ^{[1
]}

Zhu, Huanfeng ^{[1
]}

Yi, Xinyu ^{[1
]}

Cheng, Shuai ^{[1
]}

Li, Jing ^{[1
,2
]}

Wang, Songyou ^{[1
,2
]}

Lu, Ming ^{[1
,2
]}

Xu, Min ^{[1
,2
]}

Ma, Li ^{[3
]}

Lu, Lei ^{[4
]}

机构：

[1] Fudan Univ, Shanghai Ultraprecis Opt Mfg Engn Ctr, Dept Opt Sci & Engn, Shanghai 200433, Peoples R China

[2] Minist Educ, Key Lab Micro & Nano Photon Struct, Shanghai 200433, Peoples R China

[3] Tongji Univ, Coll Phys Sci & Engn, Shanghai 200092, Peoples R China

[4] Weifang Med Univ, Dept Med Phys, Weifang 261053, Shandong, Peoples R China

来源：

CHINESE OPTICS LETTERS | 2015年 / 13卷 / 10期

基金：

上海市自然科学基金; 中国国家自然科学基金;

关键词：

ZNO FILMS; LUMINESCENCE; LIGHT; AL;

D O I：

10.3788/COL201513.103101

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A number of zinc oxide (ZnO) films are deposited on silicon substrates using the magnetron sputtering method. After undergoing thermal treatment under different conditions, those films exhibit hexagonal wurtzite structures and different photoluminescent characteristics. Besides the notable ultraviolet emission, which is related to the free exciton effect, a distinct blue fluorescence around 475 nm is found in some special samples. The blue photoluminescence emission of the ZnO film is believed to be caused by oxygen vacancies.

引用

页数：4

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