Ultra-high critical electric field of 13.2 MV/cm for Zn-doped p-type β-Ga2O3

被引:45
作者
Chikoidze, E. [1 ]
Tchelidze, T. [2 ]
Sartel, C. [1 ]
Chi, Z. [1 ]
Kabouche, R. [3 ]
Madaci, I [1 ]
Rubio, C. [4 ,5 ]
Mohamed, H. [1 ,6 ]
Sallet, V [1 ]
Medjdoub, F. [3 ]
Perez-Tomas, A. [4 ,5 ]
Dumont, Y. [1 ]
机构
[1] Univ Paris Saclay, Grp Etud Matiere Condensee GEMaC, UVSQ, CNRS, 45 Av Etats Unis, F-78035 Versailles, France
[2] Ivan Javakhishvili Tbilisi State Univ, Dept Phys, 3 Av Tchavtchavadze, GE-0179 Tbilisi, Georgia
[3] CNRS, IEMN, UMR8520, Av Poincare, F-59650 Villeneuve Dascq, France
[4] CSIC, Catalan Inst Nanosci & Nanotechnol ICN2, Campus UAB, Barcelona 08193, Spain
[5] BIST, Campus UAB, Barcelona 08193, Spain
[6] Natl Res Ctr, Solid State Phys Dept, El Behooth St, Giza 12311, Egypt
关键词
Ultra-wide band gap; MOCVD growth; p type beta-Ga2O3; Electrical properties; Critical electrical field; GA2O3; THIN-FILMS; AVALANCHE BREAKDOWN VOLTAGES; CHEMICAL-VAPOR-DEPOSITION; GALLIUM OXIDE; OPTICAL-PROPERTIES; IMPACT IONIZATION; N-JUNCTIONS; GROWTH; SILICON; PERFORMANCE;
D O I
10.1016/j.mtphys.2020.100263
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Which the actual critical electrical field of the ultra-wide bandgap semiconductor beta-Ga2O3 is? Even that it is usual to find in the literature a given value for the critical field of wide and ultra-wide semiconductors such as SiC (3 MV/cm), GaN (3.3 MV/cm), beta-Ga2O3 (similar to 8 MV/cm) and diamond (10 MV/cm), this value actually depends on intrinsic and extrinsic factors such as the bandgap energy, material residual impurities or introduced dopants. Indeed, it is well known from 1950's that reducing the residual doping (N-B) of the semiconductor layer increases the breakdown voltage capability of a semiconductor media (e.g. as N-B(-3/4) by using the Fulop's approximation for an abrupt junction). A key limitation is, therefore, the residual donor/acceptor concentration generally found in these materials. Here, we report that doping with amphoteric Zinc a p-type beta-Ga2O3 thin films shortens free carrier mean free path (0.37 nm), resulting in the ultra-high critical electrical field of 13.2 MV/cm. Therefore, the critical breakdown field can be, at least, four times larger for the emerging Ga2O3 power semiconductor as compared to SiC and GaN. We further explain these wide-reaching experimental facts by using theoretical approaches based on the impact ionization microscopic theory and thermodynamic calculations. (c) 2020 Elsevier Ltd. All rights reserved.
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页数:9
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