Ion implantation for local change of the optical constants of polymer films

被引：14

作者：

Komarov, FF ^{[1
]}

Leontyev, AV ^{[1
]}

Grigoryev, VV ^{[1
]}

Kamishan, MA ^{[1
]}

机构：

[1] Belarusian State Univ, Inst Appl Phys Problems, Minsk 220080, BELARUS

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2002年 / 191卷

关键词：

implantation; photoresist; microwaveguides;

D O I：

10.1016/S0168-583X(02)00642-0

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The results of investigation of optical constant changes for films of polymethylmethacrylate, polystyrene, some of polyimides and industrial positive photoresists irradiated with light ions are presented. It was shown that ion implantation is effective method for modification of optical properties for polymers and that the approach based on molecular refraction changes for chemical bonds permits to forecast the values of refractive indices depending on irradiation doses. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：728 / 732

页数：5

共 12 条

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