In Situ SEM Indentation Experiments: Instruments, Methodology, and Applications

被引：44

作者：

Ghisleni, Rudy ^{[1
]}

Rzepiejewska-Malyska, Karolina ^{[1
]}

Philippe, Laetitia ^{[1
]}

Schwaller, Patrick ^{[1
]}

Michler, Johann ^{[1
]}

机构：

[1] EMPA Swiss Fed Labs Mat Testing & Res, Lab Mech Mat & Nanostruct, CH-3602 Thun, Switzerland

来源：

MICROSCOPY RESEARCH AND TECHNIQUE | 2009年 / 72卷 / 03期

关键词：

nanoindentation; thin film; nanowire; electrodeposited cobalt; SCANNING-ELECTRON-MICROSCOPE; THIN-FILMS; MECHANICAL-PROPERTIES; PLASTIC-DEFORMATION; CRYSTAL PLASTICITY; NANOINDENTATION; NANOWIRES; DISCRETE; STRENGTH; FRACTURE;

D O I：

10.1002/jemt.20677

中图分类号：

R602 [外科病理学、解剖学]; R32 [人体形态学];

学科分类号：

100101 ;

摘要：

The purpose of this article is to present the design and capabilities of two in situ scanning electron. microscope (SEM) indentation instruments covering a large load range from mu N to N. The capabilities and advantages of in situ SEM indentation are illustrated by two applications: indentation of a thin film and a nanowire. All the experiments were performed on electrodeposited cobalt, whose outstanding magnetic properties make it a candidate material for MEMS and NEMS devices. Microsc. Res. Tech. 72:242-249, 2009. (C) 2009 Wiley-Liss, Inc.

引用

页码：242 / 249

页数：8

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