In Situ SEM Indentation Experiments: Instruments, Methodology, and Applications

被引：44
|
作者：
Ghisleni, Rudy [1 ]
Rzepiejewska-Malyska, Karolina [1 ]
Philippe, Laetitia [1 ]
Schwaller, Patrick [1 ]
Michler, Johann [1 ]
机构：
[1] EMPA Swiss Fed Labs Mat Testing & Res, Lab Mech Mat & Nanostruct, CH-3602 Thun, Switzerland
来源：
MICROSCOPY RESEARCH AND TECHNIQUE | 2009年 / 72卷 / 03期
关键词：
nanoindentation; thin film; nanowire; electrodeposited cobalt; SCANNING-ELECTRON-MICROSCOPE; THIN-FILMS; MECHANICAL-PROPERTIES; PLASTIC-DEFORMATION; CRYSTAL PLASTICITY; NANOINDENTATION; NANOWIRES; DISCRETE; STRENGTH; FRACTURE;
D O I：
10.1002/jemt.20677
中图分类号：
R602 [外科病理学、解剖学]; R32 [人体形态学];
学科分类号：
100101 ;
摘要：
The purpose of this article is to present the design and capabilities of two in situ scanning electron. microscope (SEM) indentation instruments covering a large load range from mu N to N. The capabilities and advantages of in situ SEM indentation are illustrated by two applications: indentation of a thin film and a nanowire. All the experiments were performed on electrodeposited cobalt, whose outstanding magnetic properties make it a candidate material for MEMS and NEMS devices. Microsc. Res. Tech. 72:242-249, 2009. (C) 2009 Wiley-Liss, Inc.
引用
收藏
页码：242 / 249
页数：8
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