PROCESSING-STRUCTURE-PROPERTY CORRELATION IN DC SPUTTERED MOLYBDENUM THIN FILMS

被引：4

作者：

Khan, Majid ^{[1
,2
]}

Islam, Mohammad ^{[3
,4
]}

Akram, Aftab ^{[4
]}

Manzoor, Umair ^{[5
]}

机构：

[1] Univ Sci & Technol China, NSRL, Hefei 230029, Peoples R China

[2] Univ Sci & Technol China, Coll Nucl Sci & Technol, CAS Key Lab Soft Matter Chem, Hefei 230029, Peoples R China

[3] King Saud Univ, Coll Engn, Riyadh 11421, Saudi Arabia

[4] Natl Univ Sci & Technol, Sch Chem & Mat Engn, Islamabad 44000, Pakistan

[5] COMSATS Inst Informat Technol, Dept Phys, Islamabad, Pakistan

来源：

SURFACE REVIEW AND LETTERS | 2013年 / 20卷 / 06期

关键词：

Molybdenum; sputtering; PVD; resistivity; strain; films; BACK CONTACT;

D O I：

10.1142/S0218625X13500650

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Molybdenum thin films were sputter deposited under different conditions of DC power and chamber pressure. The structure and topography of the films were investigated using AFM, SEM and XRD techniques. Van der Pauw method and tape test were employed to determine electrical resistivity and interfacial strength to the substrate, respectively. All the films are of sub-micron thickness with maximum growth rate of 78 nm/min and crystallite size in the range of 4 to 21 nm. The films produced at high power and low pressure exhibit compressive residual strains, low electrical resistivity and poor adhesion to the glass substrate, whereas the converse is true for films produced at high pressure.

引用

页数：6

共 14 条

[1]

Al-Thani H. A., 2002, 29 IEEE PV SPEC C NE

[2] Study of the Mo thin films and Mo/CIGS interface properties [J].

Assmann, L ;

Bernède, JC ;

Drici, A ;

Amory, C ;

Halgand, E ;

Morsli, M .

APPLIED SURFACE SCIENCE, 2005, 246 (1-3) :159-166

[3] The optical and structural properties of polycrystalline Cu(In,Ga)(Se,S)2 absorber thin films [J].

Dejene, F. B. .

JOURNAL OF MATERIALS SCIENCE, 2011, 46 (21) :6981-6987

[4] Investigation of intergrain compounds in sputtered Mo films applied in CuIn1-xGaxSe2-based solar cell [J].

Gautron, E. ;

Tomassini, M. ;

Arzel, L. ;

Barreau, N. .

SURFACE & COATINGS TECHNOLOGY, 2012, 211 :29-32

[5] Development of electron reflection suppression materials for improved thermionic energy converter performance using thin film deposition techniques [J].

Islam, Mohammad ;

Inal, Osman T. ;

Luke, James R. .

JOURNAL OF APPLIED PHYSICS, 2006, 100 (08)

[6] Synthesis and characterization of Al2O3 and SiO2 films with fluoropolyrner content using rf-plasma magnetron sputtering technique [J].

Islam, Mohammad ;

Inal, Osman T. .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2008, 26 (02) :198-204

[7] Tribological properties of molybdenum coatings sprayed by electro-thermal explosion directional spraying [J].

Jin, Guo ;

Xu, Bin-shi ;

Wang, Hai-dou ;

Li, Qing-fen ;

Wei, Shi-cheng .

SURFACE & COATINGS TECHNOLOGY, 2007, 201 (15) :6678-6680

[8] Enhanced conversion efficiencies of Cu2ZnSnS4-based thin film solar cells by using preferential etching technique [J].

Katagiri, Hironori ;

Jimbo, Kazuo ;

Yamada, Satoru ;

Kamimura, Tsuyoshi ;

Maw, Win Shwe ;

Fukano, Tatsuo ;

Ito, Tadashi ;

Motohiro, Tomoyoshi .

APPLIED PHYSICS EXPRESS, 2008, 1 (04) :0412011-0412012

[9]

Kuo S.-Y., 2009, RES SOC S P, V1123

[10] Molybdenum thin film deposited by in-line DC magnetron sputtering as a back contact for Cu(In,Ga)Se2 solar cells [J].

Li, Zhao-Hui ;

Cho, Eou-Sik ;

Kwon, Sang Jik .

APPLIED SURFACE SCIENCE, 2011, 257 (22) :9682-9688

← 1 2 →