Balanced plane-mirror heterodyne interferometer with subnanometer periodic nonlinearity

被引：16
|
作者：
Hu, Peng-cheng [1 ]
Chen, Peng [1 ]
Ding, Xue-mei [1 ]
Tan, Jiu-bin [1 ]
机构：
[1] Harbin Inst Technol, Inst Ultraprecis Optoelect Instrument Engn, Harbin 150080, Peoples R China
来源：
APPLIED OPTICS | 2014年 / 53卷 / 24期
基金：
中国国家自然科学基金;
关键词：
LASER INTERFEROMETER; COMPENSATION;
D O I：
10.1364/AO.53.005448
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A balanced plane-mirror heterodyne interferometer with a polarizing beam splitter used to recombine the reference and measurement beams is proposed to reduce periodic nonlinearity and to eliminate thermal error. Experimental results indicated that the periodic error due to ghost reflection was kept within +/- 36 pm, and the interferometer proposed was immune from thermal error. (C) 2014 Optical Society of America
引用
收藏
页码：5448 / 5452
页数：5
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