3D investigations of plasma erosion craters using FIB/SEM Dual-Beam techniques

Plasma erosion craters caused by electrical discharges on the surface of materials are important features of the erosion processes resulting in the degradation of electrodes. In the present work, electrical discharges were produced on a bi-metallic Ni/Cu multilayered surface. By means of Dual Beam techniques, coupling a focused ion beam (FIB) and a scanning electron microscope (SEM), not only the surface but also the sub-surface structure of the craters were investigated. Using the combination of SEM, FIB and STEM-EDX, a complete three-dimensional investigation of the craters were carried out. The analysis of the microstructure modifications as a function of depth enabled to determine the field of interaction between the plasma and the material.