Improved analysis of microbeams under mechanical and electrostatic loads

被引：101

作者：

Choi, B ^{[1
]}

Lovell, EG ^{[1
]}

机构：

[1] UNIV WISCONSIN,DEPT MECH ENGN,MADISON,WI 53706

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1997年 / 7卷 / 01期

关键词：

D O I：

10.1088/0960-1317/7/1/005

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Stretching effects in axially constrained doubly clamped microbeams have been analysed for mechanical and electrostatic loads. A computer code based on the shooting method, a numerical integration procedure, has been developed for calculating the induced tension, deflections and stresses. Analytic solutions for concentrated force, distributed pressure and electrostatic loading were derived and verified by numerical simulation. Typical dimensions for microbeams considered are 200 mu m x 45 mu m x 2 mu m. Various cases have been evaluated, with and without induced tension and/or residual strain. Displacements and stresses are reduced when induced tension is included and are considerably smaller with intrinsic tension.

引用

页码：24 / 29

页数：6