Sensitivity of a miniaturized touch probe sensor using PZT thin film vibrator

被引：12
作者：
Kanda, T
Kurosawa, MK
Higuchi, T
机构：
[1] Univ Tokyo, Dept Precis Machinery Engn, Grad Sch Engn, Bunkyo Ku, Tokyo 1138656, Japan
[2] Tokyo Inst Technol, Dept Adv Appl Elect, Midori Ku, Yokohama, Kanagawa 2268502, Japan
来源：
ULTRASONICS | 2002年 / 40卷 / 1-8期
关键词：
touch probe sensor; PZT thin film; hydrothermal method; surface profile measurement;
D O I：
10.1016/S0041-624X(02)00091-4
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
In this paper, an improved touch probe sensor device for higher sensitivity and low contact force is reported. In order to improve the resolution, we have evaluated the sensitivity and fabricated a miniaturized sensor. The sensor transducer was 3 mm long and had higher resonance frequency. The resonance frequency of the vibrator was 937 kHz. Evaluated sensitivity was 1.0 x 10(-1) mV/nm. This value equals five times larger than that of a previous sensor. Miniaturization of the sensor device carried smaller vibration operation and higher sensitivity. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：61 / 65
页数：5
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