Nanofocusing optics for synchrotron radiation made from polycrystalline diamond

被引:20
作者
Fox, O. J. L. [1 ,2 ]
Alianelli, L. [1 ]
Malik, A. M. [3 ,4 ]
Pape, I. [1 ]
May, P. W. [2 ]
Sawhney, K. J. S. [1 ]
机构
[1] Diamond Light Source Ltd, Didcot OX11 0DE, Oxon, England
[2] Univ Bristol, Sch Chem, Bristol BS8 1TS, Avon, England
[3] Sci & Technol Facil Council, Micro & Nanotechnol Ctr, Didcot OX11 0QX, Oxon, England
[4] Univ Oxford, Dept Engn Sci, Oxford OX1 3PJ, England
基金
英国科学技术设施理事会;
关键词
X-RAY LENSES; PARABOLIC REFRACTIVE LENSES; LIGHT-SOURCE; ZONE PLATES; SILICON; GROWTH;
D O I
10.1364/OE.22.007657
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Diamond possesses many extreme properties that make it an ideal material for fabricating nanofocusing x-ray optics. Refractive lenses made from diamond are able to focus x-ray radiation with high efficiency but without compromising the brilliance of the beam. Electron-beam lithography and deep reactive-ion etching of silicon substrates have been used in a transfer-molding technique to fabricate diamond optics with vertical and smooth sidewalls. Latest generation compound refractive lenses have seen an improvement in the quality and uniformity of the optical structures, resulting in an increase in their focusing ability. Synchrotron beamline tests of two recent lens arrays, corresponding to two different diamond morphologies, are described. Focal line-widths down to 210 nm, using a nanocrystalline diamond lens array and a beam energy of E = 11 keV, and 230 nm, using a microcrystalline diamond lens at E = 15 keV, have been measured using the Diamond Light Source Ltd. B16 beamline. This focusing prowess is combined with relatively high transmission through the lenses compared with silicon refractive designs and other diffractive optics. (C) 2014 Optical Society of America
引用
收藏
页码:7657 / 7668
页数:12
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