Magnetoimpedance Effect in the FeNi/Ti-based Multilayered Structure: a Pressure Sensor Prototype

被引：6

作者：

Chlenova, A. A. ^{[1
]}

Melnikov, G. Yu. ^{[1
]}

Svalov, A. V. ^{[1
]}

Kurlyandskaya, G. V. ^{[1
,2
]}

机构：

[1] Ural Fed Univ, Inst Nat Sci, Lab Magnet Sensors, Ekaterinburg 620002, Russia

[2] Univ Pais Vasco UPVEHU, Dept Elect & Elect, Leioa 48940, Spain

来源：

PHYSICS, TECHNOLOGIES AND INNOVATION (PTI-2016) | 2016年 / 1767卷

关键词：

FILMS; IMPEDANCE;

D O I：

10.1063/1.4962588

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Magnetically soft [Ti/FeNi](5)/Ti/Cu/Ti/[FeNi/Ti](4) multilayered structures were obtained by magnetron sputtering. Based on them sensitive elements have been investigated with focus on the design of the giant magnetoimpedance ( MI) pressure sensors. Magnetic properties and MI of fabricated sensitive elements were comparatively analyzed for both multilayers deposited both onto rigid and flexible polymer substrates. Structures on a rigid substrate had the highest MI ratio of 140 %. They showed the sensitivity of 0.70 %/Ba suitable for possible applications in pressure sensing. Structures deposited onto flexible Cyclo Olefin Copolymer substrates had slightly lower sensitivity of 0.55 %/Ba. That structures showing linear dependence of MI ratio in the pressure range of 0 to 360 Ba are promising for microfluidic and biosensor applications.

引用

页数：5

共 12 条

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