Micromachined SrTiO3 single crystals as dielectrics for electrostatic doping of thin films

被引：24

作者：

Bhattacharya, A ^{[1
]}

Eblen-Zayas, M ^{[1
]}

Staley, NE ^{[1
]}

Huber, WH ^{[1
]}

Goldman, AM ^{[1
]}

机构：

[1] Univ Minnesota, Sch Phys & Astron, Minneapolis, MN 55455 USA

来源：

APPLIED PHYSICS LETTERS | 2004年 / 85卷 / 06期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1063/1.1777415

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Single crystal substrates of SrTiO3 have been micromachined locally on their back faces to thicknesses between 10 and 100 mum using a mechanical abrasive technique. Subsequently, the growth surface has been treated to obtain atomically smooth unit cell terraces, suitable for high quality interfaces. Using a capacitor geometry, surface charge densities suitable for electrostatic doping of films have been obtained at the lowest temperatures, and the off-diagonal component of strain due to the applied electric field has been measured. (C) 2004 American Institute of Physics.

引用

页码：997 / 999

页数：3

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