High-power microwave discharge for producing large-area surface-wave plasmas

被引：0
作者：
Chen Zhaoquan [1 ]
Liu Minghai [1 ]
Chen Wei [1 ]
Luo Zhiqing [1 ]
Tang Liang [1 ]
Lan Chaohui [1 ]
Hu Xiwei [1 ]
机构：
[1] Huazhong Univ Sci & Technol, Coll Elect & Elect Engn, Minist Educ, Key Lab Fus & Adv Electromagnet Technol, Wuhan 430074, Peoples R China
来源：
ISAPE 2008: THE 8TH INTERNATIONAL SYMPOSIUM ON ANTENNAS, PROPAGATION AND EM THEORY, PROCEEDINGS, VOLS 1-3 | 2008年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The theory of surface-wave discharge is introduced. A novel structure of the slot antenna array is designed in this paper, and its excitation is numerical analyzed using dipole-antenna array model and FDTD method, respectively. A microwave discharge experiment is operated with this slot-antenna array, and a numerical simulation is also done with FDTD code using the parameter of plasma from experimental measurement. It is found that the designed slot antenna array can excite effectively the microwave coupling into the cavity, and produce the stable large-area high-density plasma.
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收藏
页码：567 / 570
页数：4
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