Ion Distribution Functions in Electrically Asymmetric Capacitively Coupled Radio-Frequency Discharges in Hydrogen

被引：3

作者：

Mohr, Sebastian ^{[1
]}

Schuengel, Edmund ^{[2
]}

Schulze, Julian ^{[2
]}

Czarnetzki, Uwe ^{[1
]}

机构：

[1] Ruhr Univ Bochum, Inst Plasma & Atom Phys, D-44801 Bochum, Germany

[2] W Virginia Univ, Dept Phys, Morgantown, WV 26508 USA

来源：

IEEE TRANSACTIONS ON PLASMA SCIENCE | 2014年 / 42卷 / 10期

关键词：

Plasma simulation; plasma sheaths;

D O I：

10.1109/TPS.2014.2341112

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

Electrically asymmetric capacitively coupled radio-frequency discharges are known to give control over the ion distribution functions and the mean ion energy at the electrodes. So far, distribution functions of heavy ions such as argon have been measured and calculated. Hydrogen ions are able to follow the time-dependent electric field to a greater extent due to their low mass. This leads to unique structures in the distribution functions in case of collisional sheaths. Images of these ion distribution functions are presented.

引用

页码：2376 / 2377

页数：2

共 3 条

[1] The electrical asymmetry effect in capacitively coupled radio-frequency discharges
Czarnetzki, U.
Schulze, J.
Schuengel, E.
Donko, Z.
[J]. PLASMA SOURCES SCIENCE & TECHNOLOGY, 2011, 20 (02)
[2] Hybrid modelling of low temperature plasmas for fundamental investigations and equipment design
Kushner, Mark J.
[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2009, 42 (19)
[3] Field reversals in electrically asymmetric capacitively coupled radio-frequency discharges in hydrogen
Mohr, Sebastian
Schuengel, Edmund
Schulze, Julian
Czarnetzki, Uwe
[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2013, 46 (43)

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