The effects of sensing electrode thickness on ruthenium oxide thin-film pH sensor

被引：47
作者：
Sardarinejad, A. [1 ]
Maurya, D. K. [1 ]
Alameh, K. [1 ]
机构：
[1] Edith Cowan Univ, Electron Sci Res Inst, Joondalup, WA 6027, Australia
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2014年 / 214卷
关键词：
pH sensing; Ruthenium oxide electrodes; Water quality monitoring; Lab-on-a-chip; FABRICATION; MEMBRANE;
D O I：
10.1016/j.sna.2014.04.007
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A miniaturised pH sensor structure employing an R.F. sputtered ruthenium oxide sensing thin-film electrode in conjunction with an electroplated Ag/AgCl reference electrode is developed and the effect of the thickness of the sensing electrode on the measurement accuracy is investigated. Experimental results show that the pH sensor exhibits Nernstian slopes of 66.52 mV/pH, 68.63 mV/pH, 67.73 mV/pH, and 54.83 mV/pH for ruthenium oxide film thicknesses of 425, 300, 175 and 50 nm, respectively. All the pH measurements were carried out at a temperature of 22 degrees C. The performance and characterisation of the pH sensors in terms of sensitivity, response time, pH resolution, stability and reversibility are discussed. (C) 2014 Elsevier B.V. All rights reserved.
引用
收藏
页码：15 / 19
页数：5
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