共 50 条
- [46] Prolongation of a filament lifetime using SF6 plasma method REVIEW OF SCIENTIFIC INSTRUMENTS, 2000, 71 (02): : 1174 - 1176
- [49] ANISOTROPIC ETCHING OF SILICON IN SF6 PLASMAS - A MODEL FOR PLASMA-ETCHING REVUE DE PHYSIQUE APPLIQUEE, 1986, 21 (06): : 377 - 399