共 50 条
- [31] SILICON ETCHING EMPLOYING NEGATIVE-ION IN SF6 PLASMA JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1995, 34 (7B): : L925 - L928
- [32] Effect of Sulphur Hexafluoride (SF6) Plasma on Hydrophobicity of Methylcellulose Film FUNCTIONALIZED AND SENSING MATERIALS, 2010, 93-94 : 214 - +
- [33] Anisotropic inductively coupled plasma etching of silicon with pure SF6 Thin Solid Films, 1999, 343 : 378 - 380
- [34] SF6 Plasma Etching and Profile Evolution of Silicon in Microplasma Reactor 2013 8TH ANNUAL IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (IEEE NEMS 2013), 2013, : 1210 - 1213
- [36] FAST SILICON ETCHING USING AN EXPANDING CASCADE ARC PLASMA IN A SF6/ARGON MIXTURE JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (06): : 2387 - 2392
- [38] Optical Properties of Hydrogenated Amorphous Silicon Thin Film Deposited by PECVD 2010 INTERNATIONAL CONFERENCE ON INFORMATION, ELECTRONIC AND COMPUTER SCIENCE, VOLS 1-3, 2010, : 788 - +