共 50 条
- [23] A Scale Factor Enhancement Method Based On Parametric Modulation For A Resonant MEMS Accelerometer 2022 JOINT CONFERENCE OF THE EUROPEAN FREQUENCY AND TIME FORUM AND IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (EFTF/IFCS), 2022,
- [27] Testing scheme and experiment of temperature model for ultra-high sensitivity accelerometer Zhongguo Guanxing Jishu Xuebao/Journal of Chinese Inertial Technology, 2021, 29 (03): : 398 - 405
- [28] Folded silicon resonant accelerometer with temperature compensation PROCEEDINGS OF THE IEEE SENSORS 2004, VOLS 1-3, 2004, : 512 - 515
- [29] Temperature Compensation of FOG Scale Factor Based on CPSO-BPNN 2010 CHINESE CONTROL AND DECISION CONFERENCE, VOLS 1-5, 2010, : 2898 - 2901
- [30] A high-performance resonant MEMS accelerometer with a residual bias error of 30 μg and scale factor repeatability of 2 ppm 2023 IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS, INERTIAL, 2023,