A CMOS-MEMS Scanning Probe Microscope with Integrated Position Sensors

被引：6

作者：

Sarkar, Niladri ^{[1
]}

Mansour, Raafat ^{[1
]}

机构：

[1] Univ Waterloo, Waterloo, ON N2L 3G1, Canada

来源：

2008 1ST MICROSYSTEMS AND NANOELECTRONICS RESEARCH CONFERENCE | 2008年

关键词：

Scanning probe microscope; CMOS-MEMS; Electrothermal actuator; Closed-loop control; Cantilever;

D O I：

10.1109/MNRC.2008.4683382

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report on an integrated scanning probe microscope (SPM) fabricated in a CMOS-MEMS process. The design of this device is driven by the requirements of an atomically precise manufacturing (APM) approach based on patterned atomic layer epitaxy (ALE). A scan range of 10 mu m x 10 mu m is achieved with in-plane electrothermal actuation, and the cantilever's out-of-plane range of motion enables a 30 mu m sample approach. A test structure to optimize the in-plane actuator design is preseented, and its results are compared to an FEA model. Piezoresistive strain gauges and temperature sensors are strategically located in the in-plane actuators and the out-of-plane cantilever for use in an off-chip closed-loop positioning system.

引用

页码：77 / 80

页数：4

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