Quantitative analysis of conductive coatings by radiofrequency-powered glow discharge optical emission spectrometry: hydrogen, d.c. bias voltage and density corrections

被引：43

作者：

Payling, R

Michler, J

Aeberhard, M

机构：

[1] Swiss Fed Labs Mat Testing & Res EMPA, CH-3902 Thun, Switzerland

[2] Surface Analyt, Port Kembia, NSW 2505, Australia

来源：

SURFACE AND INTERFACE ANALYSIS | 2002年 / 33卷 / 06期

关键词：

GDOES; depth profile; galvanized steel; TiN;

D O I：

10.1002/sia.1233

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Radiofrequency-powered glow discharge optical emission spectrometry (rf-GDOES) can provide rapid quantitative depth profiles of both conductive and non-conductive coatings. Examples of three types of conductive coatings are shown here: galvanized steel, a TiN hard coating and two electrical coatings. Expected compositions and thicknesses were achieved when both d.c. bias voltage and hydrogen corrections were applied. A new algorithm for calculating the density of mixed metals, oxides and nitrides is presented. The hydrogen correction is also applied to the extreme surf ace of a metal coating for the first time. Copyright (C) 2002 John Wiley Sons, Ltd.

引用

页码：472 / 477

页数：6

共 7 条

[1]

BENGTSON A, 1999, P 5 INT C PROG AN CH, V47

[2] Gathering data on materials resistant to wear [J].

Friedrich, C ;

Berg, G ;

Broszeit, E ;

Berger, C .

MATERIALWISSENSCHAFT UND WERKSTOFFTECHNIK, 1997, 28 (02) :59-76

[3] Emission spectra of copper and argon in an argon glow discharge containing small quantities of hydrogen [J].

Hodoroaba, VD ;

Hoffmann, V ;

Steers, EBM ;

Wetzig, K .

JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY, 2000, 15 (08) :951-958

[4]

Payling R, 1997, GLOW DISCHARGE OPTICAL EMISSION SPECTROMETRY, P287

[5]

Payling R, 1997, GLOW DISCHARGE OPTICAL EMISSION SPECTROMETRY, P715

[6]

PAYLING R, 2001, J ANAL ATOM SPECTROM, V50, P16

[7]

PAYLING R, 1992, SURFACE ANAL METHODS, P387

← 1 →