The electromigration effect revisited: non-uniform local tensile stress-driven diffusion

被引:41
|
作者
Lin, Shih-kang [1 ,2 ]
Liu, Yu-chen [1 ]
Chiu, Shang-Jui [3 ]
Liu, Yen-Ting [3 ]
Lee, Hsin-Yi [3 ]
机构
[1] Natl Cheng Kung Univ, Dept Mat Sci & Engn, Tainan 70101, Taiwan
[2] Natl Cheng Kung Univ, Ctr Micro Nano Sci & Technol, Tainan 70101, Taiwan
[3] Natl Synchrotron Radiat Res Ctr, Hsinchu 30076, Taiwan
来源
SCIENTIFIC REPORTS | 2017年 / 7卷
关键词
ALUMINUM FILMS; THIN; FAILURE; ENERGY; ALLOY; TIN;
D O I
10.1038/s41598-017-03324-5
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
The electromigration (EM) effect involves atomic diffusion of metals under current stressing. Recent theories of EM are based on the unbalanced electrostatic and electron-wind forces exerted on metal ions. However, none of these models have coupled the EM effect and lattice stability. Here, we performed in situ current-stressing experiments for pure Cu strips using synchrotron X-ray diffractometry and scanning electron microscopy and ab initio calculations based on density functional theory. An intrinsic and non-uniform lattice expansion-larger at the cathode and smaller at the anode, is identified induced by the flow of electrons. If this electron flow-induced strain is small, it causes an elastic deformation; while if it is larger than the yield point, diffusion as local stress relaxation will cause the formation of hillocks and voids as well as EM-induced failure. The fundamental driving force for the electromigration effect is elucidated and validated with experiments.
引用
收藏
页数:10
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