Demonstration of solar-blind AlxGa1-xN-based heterojunction phototransistors

被引:30
作者
Zhang, Lingxia [1 ]
Tang, Shaoji [1 ]
Liu, Changshan [1 ]
Li, Bin [1 ]
Wu, Hualong [1 ]
Wang, Hailong [1 ]
Wu, Zhisheng [2 ]
Jiang, Hao [2 ,3 ]
机构
[1] Sun Yat Sen Univ, Sch Phys & Engn, Guangzhou 510275, Guangdong, Peoples R China
[2] Sun Yat Sen Univ, State Key Lab Optoelect Mat & Technol, Guangzhou 510275, Guangdong, Peoples R China
[3] Sun Yat Sen Univ, Sch Microelect, Guangzhou 510275, Guangdong, Peoples R China
关键词
MG; EFFICIENCY;
D O I
10.1063/1.4937389
中图分类号
O59 [应用物理学];
学科分类号
摘要
Al0.4Ga0.6N/Al0.65Ga0.35N heterojunction phototransistors have been fabricated from the epi-structure grown by low-pressure metal organic chemical vapor deposition on c-plane sapphire substrates. P-type conductivity of the AlGaN base layer was realized by using indium surfactant-assisted Mg-delta doping method. Regrowth technique was used to suppress the Mg memory effect on the n-type emitter. The fabricated devices with a 150-mu m-diameter active area exhibited a bandpass spectral response between 235 and 285 nm. Dark current was measured to be less than 10 pA for bias voltages below 2.0V. A high optical gain of 1.9 x 10(3) was obtained at 6V bias. (C) 2015 AIP Publishing LLC.
引用
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页数:4
相关论文
共 17 条
[1]   Improved detection of the invisible [J].
Carrano, JC ;
Li, T ;
Grudowski, PA ;
Dupuis, RD ;
Campbell, JC .
IEEE CIRCUITS & DEVICES, 1999, 15 (05) :15-24
[2]   High hole concentration in p-type AlGaN by indium-surfactant-assisted Mg-delta doping [J].
Chen, Yingda ;
Wu, Hualong ;
Han, Enze ;
Yue, Guanglong ;
Chen, Zimin ;
Wu, Zhisheng ;
Wang, Gang ;
Jiang, Hao .
APPLIED PHYSICS LETTERS, 2015, 106 (16)
[3]   Effects of Mg accumulation on chemical and electronic properties of Mg-doped p-type GaN surface [J].
Hashizume, T .
JOURNAL OF APPLIED PHYSICS, 2003, 94 (01) :431-436
[4]   Back-illuminated separate absorption and multiplication AlGaN solar-blind avalanche photodiodes [J].
Huang, Y. ;
Chen, D. J. ;
Lu, H. ;
Dong, K. X. ;
Zhang, R. ;
Zheng, Y. D. ;
Li, L. ;
Li, Z. H. .
APPLIED PHYSICS LETTERS, 2012, 101 (25)
[5]   AlGaN Solar-Blind Avalanche Photodiodes with Enhanced Multiplication Gain Using Back-Illuminated Structure [J].
Huang, Zeqiang ;
Li, Jianfei ;
Zhang, Wenle ;
Jiang, Hao .
APPLIED PHYSICS EXPRESS, 2013, 6 (05)
[6]   Hole conductivity and compensation in epitaxial GaN:Mg layers [J].
Kaufmann, U ;
Schlotter, P ;
Obloh, H ;
Köhler, K ;
Maier, M .
PHYSICAL REVIEW B, 2000, 62 (16) :10867-10872
[7]   Enhanced Mg doping efficiency in Al0.2Ga0.8N/GaN superlattices [J].
Kozodoy, P ;
Hansen, M ;
DenBaars, SP ;
Mishra, UK .
APPLIED PHYSICS LETTERS, 1999, 74 (24) :3681-3683
[8]   Ultraviolet bandpass Al0.17Ga0.83N/GaN heterojunction phototransitors with high optical gain and high rejection ratio [J].
Lee, M. L. ;
Sheu, J. K. ;
Shu, Yung-Ru .
APPLIED PHYSICS LETTERS, 2008, 92 (05)
[9]   High quantum efficiency AlGaN solar-blind p-i-n photodiodes [J].
McClintock, R ;
Yasan, A ;
Mayes, K ;
Shiell, D ;
Darvish, SR ;
Kung, P ;
Razeghi, M .
APPLIED PHYSICS LETTERS, 2004, 84 (08) :1248-1250
[10]   Photoresponse and defect levels of AlGaN/GaN heterobipolar phototransistor grown on low-temperature AlN interlayer [J].
Mouillet, R ;
Hirano, A ;
Iwaya, M ;
Detchprohm, T ;
Amano, H ;
Akasaki, I .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2001, 40 (5B) :L498-L501